Research
Specialisations
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering
- Atomic and Molecular Physics, and Optics
Research topics
- Copper Interconnects and Reliability
- Semiconductor materials and devices
- Plasma Diagnostics and Applications
- Advancements in Photolithography Techniques
- Semiconductor materials and interfaces
- Publications
- 529
- Citations
- 10.6K
- h-index
- 46
- Papers, last 3 years
- 3
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