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Materials Science

Mikhaı̈l R. Baklanov

MIREA - Russian Technological University

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Research

Specialisations

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering
  • Atomic and Molecular Physics, and Optics

Research topics

  • Copper Interconnects and Reliability
  • Semiconductor materials and devices
  • Plasma Diagnostics and Applications
  • Advancements in Photolithography Techniques
  • Semiconductor materials and interfaces
Publications
529
Citations
10.6K
h-index
46
Papers, last 3 years
3

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